JPH0233257U - - Google Patents
Info
- Publication number
- JPH0233257U JPH0233257U JP11265188U JP11265188U JPH0233257U JP H0233257 U JPH0233257 U JP H0233257U JP 11265188 U JP11265188 U JP 11265188U JP 11265188 U JP11265188 U JP 11265188U JP H0233257 U JPH0233257 U JP H0233257U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- correction plate
- substrate holder
- sputtering
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11265188U JPH0233257U (en]) | 1988-08-26 | 1988-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11265188U JPH0233257U (en]) | 1988-08-26 | 1988-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233257U true JPH0233257U (en]) | 1990-03-01 |
Family
ID=31351783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11265188U Pending JPH0233257U (en]) | 1988-08-26 | 1988-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233257U (en]) |
-
1988
- 1988-08-26 JP JP11265188U patent/JPH0233257U/ja active Pending
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